Design and Fabrication of a 3-DOF Piezoresistive Micro Accelerometer

This book presented a hierarchical MEMS design synthesis and optimization process developed for a specific structure of accelerometer. The design synthesis methodology exploits the fast and accurate simulation of the SUGAR tool (based on modified modal analysis) along with the full simulation capability of ANSYS (based on the finite element method). During the course of design, the modified nodal analysis and the finite element methods were combined in optimizing the sensor structure. After fabrication process, the utilizing of Allan variance method is also very useful to determine errors caused by both of the intrinsic sensor’s noises and interface circuit’s. Another important contribution of this book is that comprehensive analysis considering the impact of many parameters, such as the doping concentration, temperature, noises, and power consumption on optimization of the sensitivity and resolution has been proposed in order to enhance sensitivity and resolution of the accelerometer.